Technical References: Microfluidics

(MF-11-01) Suspended SU-8 structures for monolithic microfluidic channels
Moser, Y. (Laboratory of Microsystems, Ecole Polytechnique Fédérale de Lausanne, Lausanne (EPFL), EPFL STI IMT LMIS2, 1015 Lausanne, Switzerland); Forti, R.; Jiguet, S.; Lehnert, T.; Gijs, M.A.M.
Microfluidics and Nanofluidics, v 10, n 1, p 219-224, January, 2011

(MF-11-02) Fabrication process of a SU-8 monolithic pressurized microchamber for pressure driven microfluidic applications
Moreno, J.M. (Dept. de Ing. Electron., Univ. of Seville, Seville, Spain); Perdigones, F.; Quero, J.M.
2011 Proceedings of the 8th Spanish Conference on Electron Devices (CDE'2011), p 4 pp., 2011

(MF-11-03) Design and fabrication of SU-8 arrayed-waveguide gratings using multimode interference couplers
Zhu, Yunpeng (Centre for Optical and Electromagnetic Research, State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou, China); Yang, Bo; Jiao, Yuqing; Dai, Daoxin
Proceedings of SPIE - The International Society for Optical Engineering, v 7986, 2011, Passive Components and Fiber-Based Devices VII

(MF-11-04) Fabrication of SU-8 microreactors for radiopharmaceutical production
Zizzari, A. (National Nanotechnology Laboratory (CNR-INFM), Distretto Tecnologico ISUFI, Università del Salento, via Arnesano, I-73100 Lecce, Italy); Arima, V.; Zacheo, A.; Pascali, G.; Salvadori, P.A.; Perrone, E.; Mangiullo, D.; Rinaldi, R.
Microelectronic Engineering, 2011

(MF-11-05) Fully integrated PDMS/SU-8/quartz microfluidic chip with a novel macroporous poly dimethylsiloxane (PDMS) membrane for isoelectric focusing of proteins using whole-channel imaging detection
Seyed Mostafa Shameli1, Caglar Elbuken1 Junjie Ou1,2 Carolyn L. Ren1 Janusz Pawliszyn2
1Department of Mechanical and Mechatronics Engineering, University of Waterloo, Waterloo, ON, Canada
2Department of Chemistry, University of Waterloo, Waterloo, ON, Canada
Electrophoresis, 32, 333–339, 2011

(MF-11-06) Design and fabrication of an ac-electro-osmosis micropump with 3D high-aspect-ratio electrodes using only SU-8
Rouabah, H.A. (Sch. of Electron. & Comput. Sci., Univ. of Southampton, Southampton, United Kingdom); Park, B.Y.; Zaouk, R.B.; Morgan, H.; Madou, M.J.; Green, N.G.
Journal of Micromechanics and Microengineering, v 21, n 3, p 035018 (9 pp.), March, 2011

(MF-11-07) Selective Thin Film Deposition for Optofluidic Platforms with Optimized Transmission
Phillips, B.S.; Jenkins, M.H.; Liu, S.L.; Schmidt, H.; Hawkins, A.R.;
Photonics Technology Letters, IEEE
Volume: PP , Issue: 99
Digital Object Identifier: 10.1109/LPT.2011.2132125
Page(s): 1, 2011

(MF-10-01) Nanofluidic channels fabricated by e-beam lithography and polymer reflow sealing
Fouad, Mina; Yavuz, Mustafa; Cui, Bo;
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Volume: 28 , Issue: 6 Digital Object Identifier: 10.1116/1.3517620
Page(s): C6I11 - C6I13, 2010

(MF-10-02) Polymer (SU-8) optofluidic device with embedded hydrogel oxygen sensing elements
Zhan Gao; Henthorn, D.B.; Chang-Soo Kim;
Sensors, 2010 IEEE Digital Object Identifier: 10.1109/ICSENS.2010.5690839
Page(s): 79 – 82, 2010

(MF-09-01) Fabrication of a hybrid PDMS/SU-8/quartz microfluidic chip for enhancing UV absorption whole-channel imaging detection sensitivity and application for isoelectric focusing of proteins
Junjie Ou, Tomasz Glawdel, Carolyn L. Ren, and Janusz Pawliszyn
Lab Chip 9 1926, 2009

(MF-09-02) SU-8 microfluidic channels with porous sidewalls for biological applications
Michael R. Padgen, Alison Gracias, Natalya Tokranova, Nathaniel Cady, and James Castracane
Proc. SPIE 7207 720707, 2009

(MF-08-01) An SU-8 based fluidic immuno-spectroscopic lab-on-a-chip for rapid quantitative detection of biomolecules
Linan Jiang; Gerhardt, K.P.; Myer, B.; Zohar, Y.; Pau, S.;
Micro Electro Mechanical Systems, 2008. MEMS 2008. IEEE 21st International Conference on; Digital Object Identifier: 10.1109/MEMSYS.2008.4443628
Page(s): 204 – 207, 2008

(MF-08-02) A novel microfluidic sensor system fabricated by SU-8 femtosecond pulsed laser prototyping
Rosenauer, M.; Zoppel, S.; Vellekoop, M.J.;
Electronics Technology, 2008. ISSE '08. 31st International Spring Seminar on
Digital Object Identifier: 10.1109/ISSE.2008.5276616
Page(s): 496 – 500, 2008

(MF-07-01) Stretching and selective immobilization of DNA in SU-8 micro- and nanochannels
B. Yang, V. R. Dukkipati, D. Li, B. L. Cardozo, and S. W. Pang
J. Vac. Sci. Technol. B 25, 2352 , 2007

(MF-07-02) SU-8 Buckled-type Microvalves Switched by Surface Tension Forces
Lung-Jieh Yang; Kuan-Chun Liu;
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conf. on
Digital Object Identifier: 10.1109/NEMS.2007.352238
Page(s): 105 – 108, 2007

(MF-07-03) Stability Analysis and Fabrication Process of a Multiple Flow Focusing Microdevice Built in SU-8
Perdigones, F.A.; Luque, A.; Ganan-Calvo, A.M.; Quero, J.M.;
Industrial Electronics, 2007. ISIE 2007. IEEE International Symposium on
Digital Object Identifier: 10.1109/ISIE.2007.4375134
Page(s): 3244 – 3249, 2007

(MF-07-04) Design of Electrical Interconnect for SU-8 Microfluidic Systems
Ueda, T.; Jaffer, S.; Westwood, S.; Gray, B.L.;
Electrical and Computer Engineering, 2007. CCECE 2007. Canadian Conference on
Digital Object Identifier: 10.1109/CCECE.2007.8
Page(s): 5 – 7, 2007

(MF-07-05) Thick SU-8 and PDMS Three-Dimensional Enclosed Channels for Free-Standing Polymer Microfluidic Systems
Westwood, S.M.; Jaffer, S.; Lui, O.A.; Gray, B.L.;
Electrical and Computer Engineering, 2007. CCECE 2007. Canadian Conference on
Digital Object Identifier: 10.1109/CCECE.2007.10
Page(s): 12 – 15, 2007

(MF-07-06) Stretching and selective immobilization of DNA in SU-8 micro- and nanochannels
Yang, B.; Dukkipati, V. R.; Li, D.; Cardozo, B. L.; Pang, S. W.;
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Volume: 25 , Issue: 6 Digital Object Identifier: 10.1116/1.2806975
Page(s): 2352 – 2356, 2007

(MF-06-01) An injection micromixer fabricated by improved SU-8 processing for biochemical microfluidic systems
Changgeng Liu, Zhong-geng Ling, Kun Lian, Jost Goettert, and Josef Hormes
Proc. SPIE 6112 61120G , 2006

(MF-06-02) An all SU-8 microfluidic chip with built-in 3D fine microstructures
Hironobu Sato1,2, Hirokazu Matsumura1, Satoshi Keino1 and Shuichi Shoji1
1 Department of Electrical Engineering and Bioscience, Waseda Univ., 3-4-1 Ohkubo, Shinjuku, Tokyo 169-8555, Japan
2 Japan Science and Technology Agency, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan
J. Micromech. Microeng. 16 2318–2322, 2006

(MF-06-03) Rapid Fabrication Process for High Aspect-Ratio Embedded Microchannels with Orifices Using a Single SU-8 Layer On a mask
T. Suzuki; T. Tokuda; H. Yamamoto; M. Ohoka; I. Kanno; M. Washizu; H. Kotera;
Micro Electro Mechanical Systems, 2006. MEMS 2006 Istanbul. 19th IEEE International Conference on
Digital Object Identifier: 10.1109/MEMSYS.2006.1627807
Page(s): 346 – 349, 2006

(MF-06-04) SU-8 microfluidic mixer for use in lab-on-a-chip devices for biological fluids analyses
Oliveira, H.C.; Rocha, J.G.; Barros, I.; Cabral, J.M.; Minas, G.;
Industrial Technology, 2006. ICIT 2006. IEEE International Conference on
Digital Object Identifier: 10.1109/ICIT.2006.372677
Page(s): 3014 – 3019, 2006

(MF-06-05) CMOS compatible integration of three-dimensional microfluidic systems based on low-temperature transfer of SU-8 films
Zheng-chun Peng; Zhong-geng Ling; Tondra, M.; Chang-geng Liu; Min Zhang; Kun Lian; Goettert, J.; Hormes, J.;
Microelectromechanical Systems, Journal of; Volume: 15 , Issue: 3
Digital Object Identifier: 10.1109/JMEMS.2006.876793
Page(s): 708 – 716, 2006

(MF-05-01) A SU-8 microfluidic total analysis system integrating silicon photodiodes and buried waveguides
de la Fuente, P.; Etxeberria, J.A.; Berganzo, J.; Arroyo, M.T.; Castano, E.; Gracia, F.J.; Ruano-Lopez, J.M.;
Electron Devices, 2005 Spanish Conference on;
Digital Object Identifier: 10.1109/SCED.2005.1504482 461 – 464, 2005


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