Technical References: Cantilevers

(CL-11-01) Arrays of SU-8 microcantilevers with integrated piezoresistive sensors for parallel AFM applications
Andreas Schneider, Robert H. Ibbotson, Richard J. Dunn, Ejaz Huq
Science and Technology Facilities Council, Rutherford Appleton Laboratory, Micro & Nanotechnology Centre (MNTC), Harwell Science and Innovation Campus, Didcot OX11 0QX, UK
Microelectronic Engineering, 88 (8), p.2390, 2011

(CL-11-02) Fabrication and characterization of SRN/SU-8 bimorph cantilevers for temperature sensing
Larsen, Tom (Department of Micro- and Nanotechnology, Technical University of Denmark, DTU Nanotech, Building 345 East, DK-2800 Kongens Lyngby, Denmark); Keller, Stephan; Schmid, Silvan; Dohn, Sren; Boisen, Anja
Microelectronic Engineering, 88 (8), p.2311, 2011

(CL-11-03) Superparamagnetic photocurable nanocomposite for the fabrication of microcantilevers
M. Suter 1, O. Ergeneman 2, J. Zürcher 1, S. Schmid 1,5, A. Camenzind 3
B. J Nelson 2 and C. Hierold 1
1 Micro and Nanosystems, Department of Mechanical and Process Engineering, ETH Zurich, Switzerland
2 Institute of Robotics and Intelligent Systems, Department of Mechanical and Process Engineering, ETH Zurich, Switzerland
3 Particle Technology Laboratory, Department of Mechanical and Process Engineering, ETH Zurich, Switzerland
J. Micromech. Microeng. 21 (2011)

(CL-10-01) Fabrication of thin SU-8 cantilevers: initial bending, release and time stability
Stephan Keller 1,3, Daniel Haefliger 2 and Anja Boisen 1
1 DTU Nanotech—Department of Micro- and Nanotechnology, Technical University of Denmark,
Bldg. 345 East, DK-2800 Kgs. Lyngby, Denmark
2 Sensirion AG, CH-8712 Staefa, Switzerland
J. Micromech. Microeng. 20 (2010) 045024 (11pp)

(CL-10-02) Suspended membranes, cantilevers and beams using SU-8 foils
J. Melai, V.M. Blanco Carballo, C. Salm *, J. Schmitz
University of Twente/Mesa+ Institute for Nanotechnology, Hogekamp 3262, P.O. Box 217, Enschede 7500, AE, The Netherlands
Microelectronic Engineering 87, 1274–1277 (2010)

(CL-10-03) Diffusion of water into SU-8 microcantilevers
Chuanjun Liu, Ying Liu, Mordechai Sokuler, Daniela Fell, Stephan Keller, Anja Boisen, Hans-Jürgen Butt, Günter K. Auernhammer, and Elmar Bonaccurso
Phys. Chem. Chem. Phys. 12 10577 (2010)

(CL-10-04) Fabrication of a Wheatstone-Bridge Integrated SU-8 Cantilever
Jun-Hyung Ahn, Chang-Sin Park, and Dong-Weon Lee
Jpn. J. Appl. Phys. 49 06GN01 (2010)

(CL-10-05) An electro-thermal SU-8 cantilever micro actuator based on bimorph effect
Xiaobo Zhang; Yibo Wu; Xiaodan Miao; Congchun Zhang; Guifu Ding;
Nano/Micro Engineered and Molecular Systems (NEMS), 2010 5th IEEE International Conference on
Digital Object Identifier: 10.1109/NEMS.2010.5592235
Page(s): 362 – 365, 2010

(CL-09-01) Fabrication of an in-plane SU-8 cantilever with integrated strain gauge for wall shear stress measurements in fluid flows
N J Allen a, D Wood b*, M C Rosamond b, D B Sims-Williams b
a. Stirling Dynamics, Terminal Building, Blackbushe Airport, Camberley, Surrey, GU17 9LQ, United Kingdom
b. School of Engineering, Durham University, South Road, Durham, UK, DH1 3LE, United Kingdom
Procedia Chemistry 1 923–926, 2009

(CL-08-01) SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods
Maria Nordström 1,*, Stephan Keller 1, Michael Lillemose 1, Alicia Johansson 2, Søren Dohn 1,
Daniel Haefliger 3, Gabriela Blagoi 1, Mogens Havsteen-Jakobsen 1 and Anja Boisen 1
1 MIC – Department of Micro and Nanotechnology, Technical University of Denmark, DTU building
345 East, DK-2800 Kongens Lyngby, Denmark
2 Now at PhotoSolar ApS, Denmark 3 Now at HARTING Mitronics AG, Switzerland
Sensors, 8, 1595-1612, 2008

(CL-07-01) Bending characteristics of SU-8
Spratley, J.P.F.; Ward, M.C.L.; Hall, P.S.;
Micro & Nano Letters, IET Volume: 2 , Issue: 2
Digital Object Identifier: 10.1049/mnl:20070022
Page(s): 20 – 23, 2007

(CL-07-02) Optimized plasma-deposited fluorocarbon coating for dry release and passivation of thin SU-8 cantilevers
Stephan Keller, Daniel Haefliger, and Anja Boisen
J. Vac. Sci. Technol. B 25, 1903 (2007)

(CL-07-03) Optimized plasma-deposited fluorocarbon coating for dry release and passivation of thin SU-8 cantilevers
Keller, Stephan; Haefliger, Daniel; Boisen, Anja;
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Volume: 25 , Issue: 6
Digital Object Identifier: 10.1116/1.2806960
Page(s): 1903 – 1908, 2007

(CL-07-04) Integrated Nickel Micro-Nano-Hall Sensors on SU-8 Cantilevers for Scanning Hall Probe Microscopy
Mouaziz, S.; Imboden, C.; Santschi, C.; Mena, O.V.; Popovic, R.; Brugger, J.; Boero, G.;
Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International Digital Object Identifier: 10.1109/SENSOR.2007.4300701
Page(s): 2589 – 2592, 2007

(CL-05-01) Microscopic four-point probe based on SU-8 cantilevers
Keller, S.; Mouaziz, S.; Boero, G.; Brugger, J.;
Review of Scientific Instruments, Volume: 76 , Issue: 12
Digital Object Identifier: 10.1063/1.2140443
Page(s): 125102 - 125102-4, 2005

(CL-03-01) Mechanical strength and interfacial failure analysis of cantilevered SU-8 microposts
Hwa Seng Khoo 1, Kuo-Kang Liu 1 and Fan-Gang Tseng 2
1 Centre for Mechanics of Microsystems (CMMS), School of Mechanical and Production
Engineering, Nanyang Technological University, Singapore 639798
2 BioMEMS and Micro Fluidics Laboratory, Department of Engineering & System Science,
National Tsing Hua University, No 101, Sec. 2, Kuang Fu Road, Hsinchu, Taiwan 30040, ROC
J. Micromech. Microeng. 13 822–831, 2003


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