UV™6 Positive DUV Resist
Optimized to provide vertical profile imaging of dense and semi-isolated features for device production design rules to 180 nm
- Superior etch resistance
- Wide process window
- 150° thermal stability
UV™-6 Data Sheet
- General Lithography: Positive DUV Resists
MicroChem's distribution of Dow Electronic Materials semiconductor and advanced packaging electronic materials is supported by our value-added services founded on chemical and formulary knowledge, extensive applications experience, and process engineering expertise.
Find additional Dow materials for your applications.