MEGAPOSIT™ SPR™3600M Series Advanced i-Line Photoresists

Dow Electronic Materials
MEGAPOSIT™ SPR™3600M Series Advanced i-line Photoresists

Dyed photoresist for extremely high throughput processing on reflective substrates

  • Broadband, g-Line and i-Line capable
  • Thermal stability ≥125°C
  • Compatible across a wide variety of developer families

SPR™3600 Data Sheet



  • High Resolution i-Line
  • Bi-layer Lift-off

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