MEGAPOSIT™ SPR™3600M Series Advanced i-Line Photoresists
Dyed photoresist for extremely high throughput processing on reflective substrates
- Broadband, g-Line and i-Line capable
- Thermal stability ≥125°C
- Compatible across a wide variety of developer families
SPR™3600 Data Sheet
- High Resolution i-Line
- Bi-layer Lift-off
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