MEGAPOSIT™ SPR™3000 Series Photoresists

Dow Electronic Materials
MEGAPOSIT™ SPR™3000 Series Photoresists

Positive photoresist engineered for i-Line, g-Line, and broadband applications with high resolution, high throughput, and excellent process latitudes

  • Glycol ether- and xylene-free solvent system
  • Excellent adhesion
  • Superior coating uniformity

SPR™3000 Data Sheet



  • Wet Etch
  • Dry Etch

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