MEGAPOSIT™ SPR™220 Series Thick i-Line Photoresists
General purpose, multi-wavelength photoresist designed to cover a wide range of film thicknesses with a single-coat process
- Film Thickness 1-14 µm
- Broadband, g-Line and i-Line capable
- Excellent wet and dry etch adhesion
SPR™220 Data Sheet
- Dry Etch
- Plating: Thick Positive Resists
- Bi-layer Lift-off
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