MEGAPOSIT™ SPR™220 Series Thick i-Line Photoresists

Dow Electronic Materials
MEGAPOSIT SPR™220 Series Thick i-line Photoresists

General purpose, multi-wavelength photoresist designed to cover a wide range of film thicknesses with a single-coat process

  • Film Thickness 1-14 µm
  • Broadband, g-Line and i-Line capable
  • Excellent wet and dry etch adhesion

SPR™220 Data Sheet



  • DRIE
  • Dry Etch
  • Plating: Thick Positive Resists
  • Bi-layer Lift-off
  • Microlenses

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