Applications > MEMS

Micro Molds and Stamps Using SU-8 or KMPR

There is a need for faster and less expensive techniques to produce microstructures in PDMS, PMMA and other materials. SU-8 Series micro molds and stamps are being used for this purpose. Using photolithography, a design can easily be defined on a silicon wafer creating a mold quickly and easily. A typical application is microfluidic components and systems. Devices can be fabricated rapidly to move from research, to prototyping, and eventually to large-scale production.

 


 

Advantages of SU-8 and KMPR UV fabricated micro molds

  • Low cost fabrication
  • Possibility to superimpose several levels
  • High photoresist thickness
    • Simple coating > 100 m
    • Multiple coatings > several hundred m
  • Rapid proto-typing
  • Reusable

 


 





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SU-8 for producing micro gears using electroforming


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A 180 m thick KMPR photoresist mold deposited using a multiple spin coating process.

SEMs Source: Electrochemical Co-deposition of Metal-Nanoparticle Composites for Microsystem Apps.
Kyle Jiang, School of Mechanical Engineering, University of Birmingham, UK, B15 2TT



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